NFPA 318: 半导体制作器械保护标准
日期:2012-02-09 15:13
18.
Up-to-date with the latest references to NFPA codes and other documents, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable RD areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both.
Chapters cover core topics including:
Fire protection
Ventilation and exhaust systems
Construction
Chemical storage and handling
Hazardous gas cylinder stor
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