NFPA 318: 半导体制作器械保护标准
日期:2012-02-09 15:13
NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities
NFPA 318: 半导体制作器械保护标准
1.1 Scope. This standard applies to semiconductor fabrication facilities and comparable fabrication processes, including research and development areas in which hazardous chemicals are used, stored, and handled and containing what is herein defined as a cleanroom or clean zone, or both.
Safeguard people and property in semiconductor plants and research facilities with the 2012 NFPA 3
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